5 伺服控制、驱动及接口
5.1 步进电机控制系统的组成
步进电机的控制系统由可编程控制器、环行脉冲分配器和步进电机功率驱动器组成,其结构见图1。
控制系统中PLC用来产生控制脉冲;通过PLC编程输出一定数量的方波脉冲,控制步进电机的转角进而控制伺服机构的进给量;同时通过编程控制脉冲频率——既伺服机构的进给速度;环行脉冲分配器将可编程控制器输出的控制脉冲按步进电机的通电顺序分配到相应的绕组。PLC控制的步进电机可以采用软件环行分配器,也可以采用如图1所示的硬件环行分配器。采用软环占用的PLC资源较多,特别是步进电机绕组相数M>4时,对于大型生产线应该予以充分考虑。采用硬件环行分配器,虽然硬件结构稍微复杂些,但可以节省占用PLC的I/O口点数,目前市场有多种**芯片可以选用。步进电机功率驱动器将PLC输出的控制脉冲放大到几十~上百伏特、几安~十几安的驱动能力。一般PLC的输出接口具有一定的驱动能力,而通常的晶体管直流输出接口的负载能力仅为十几~几十伏特、几十~几百毫安。但对于功率步进电机则要求几十~上百伏特、几安~十几安的驱动能力,因此应该采用驱动器对输出脉冲进行放大。PV Measurements Solar Photovoltaic Reference, PVM444
Siemens Power Supply 6ES7 407-0KR00-0AA0, 6ES7-407-0KR00-0AA0, SHIPSAMEDAY1630C
SWAGELOK H22-BN5459-20 Hastelloy 1/4"T, 3way Shipsameday W/2-3daysshipping ZF35
Inficon AG LI-9496 pressure gauge CF 2.75", 353-508, BPG400-SD, 354-491 1557A6
Inficon AG LI-9496 pressure gauge CF 2.75", 353-507, BPG400-SD, 354-491 1557A5
MKS INSTRUMENTS In Situ Diagnostic Access Valve IDA, IDA-T007, 3870-01987
DANAHER MOTION SERVO AMPLIFIER, HPAR-15840-601-4501B14
MKS INSTRUMENTS In Situ Diagnostic Access Valve IDA Tool16, IDA-T016, 1551P
MICROCHIP MCP23S17-E/SS, IO EXPANDER, 16BIT, 28SSOP, SHIPSAMEDAYR4
BRANSON/IPC Plasma Program Controller, PM906U-4
Mks Mass Flow Controller 1/2" VCR 300 SLM / HE / 1579A00132LR14V / VITON 120C2
SIEMENS 6SL3210-1KE22-6AP0
Voltronics trimmer Variable capacitor .6-5pF, A4M5, SHIPSAMEDAY Y14
Mecos Traxler MPA3-50 & FDC240
MKS Baratron Pressure Transducer 1 Torr, 1/4" FVCR, 690A01TRC
PHOENIX CONTACT Motor Starter, 2732389, 27 32 3 89, IB L2 IP 500 MLR-4-6A, B17
20x PARKER Push-Lok Barbed Female JIC 37° Swivel 3/4" SST, 30682-12-12-C 1550D3
Swagelok Diaphragm Valve, 6LVV-MSM-ALD3T-2-P-CSV, 200C ALD
Edwards PV40EKS Right Angle Valve KF-40, C414-04-000
ALLEN-BRADLEY AC DRIVE, 3-PHASE, 10.4kVA, 1336-B007-FOD-13
Eltrotec Sensor M8X68Mm Cyl Laser 10610212, LLS8/0.5Q 1600A7
OMRON Smart Sensor Camera, ZFX-SC, SHIPSAMEDAY1227B1
Mks Mass Flow Controller 1/2" VCR 300 SLM / HE / 1579A00132LR14V / VITON 120CA
SilPac High Purity & Industrial SP-RPXSP6-HPM0DA0
StripIR Infrared Heating 25" Lamp/Housing 5000W, 5306B-25-3500-00-00, 103390-008
SMC HIGH VACUUM VALVE 1/4" FVCR, XVD2-02VF-X507, XVD2-02VF, Shipsameday1181P1
NTI XTENDEX Remote and Local Unit, ST-C5KVM-600M
SMC Pneumatic Rodless Cylinder MY2H40G-660L-XB11
PANASONIC Color CCD Camera GP-KR222
ASSY FESTO 18980, 18968, 18969, 18671, 174483, 18738, 18652, 18781,18639, 159432
General Scanning PWA E11-13209-7 Rev D & GSI 000-3008528
CAMCO Rotary Indexer 80RDM8H16-330, D-67119
SMC Angle Valve High Vacuum NW63, XLA-63D-A93LA-XAQ3-A-01N
Brooks Mass Flow Controller GF080CXXC, GF080C-100766
RENISHAW incremental encoder system, S-9SRH-0247
Allan Aircraft AA67010-16KA (AA67010) & AA67029-16KA (AA67029) W30
18X Amphenol Circular Elbow MIL Connector 31461-E2121R13041S0055
MTS TempsonicsGH-Series Linear Position Sensor, GHS0060UD602V0
MIZAR GPC CPU MODULE 9248044, MZ8115-E-27-N, GPCROM.S, 79K33557-1
GREIFER LIGHT-SPRING ULS-80, ULS80, 15130002, SHIPSAMEDAY1542Z10
Allen Bradley LOGIX 5335E PRO 1769-L35E, 1769-PA4, 1769-SDN, 1769-ECR, 1784-CF64
SAINT-GOBAIN PERFORMANCE **STIC 730002109
Metrobility Gig-E Services Line expansion module, R851-1S, SHIPSAMEDAY X44A
Mks Mass Flow Controller 1/2" VCR 300 SLM / HE / 1579A00132LR14V / VITON 134C8
QUANTUM QT60161B-ASG, IC SM TOUCH SENSOR 16 CHANWAFFLE80 S86
Linear IC OPAMP GP 7.2MHZ RRO 8SO, LT1677IS8PBF, SHIPSAMEDAY Q51
Fisher Controls Model TL102, Flow Controller 5903853, Shipsameday 1615A
PARKER Push-Lok Barbed Female JIC 37° Swivel 3/4" SST, 30682-12-12-C 1550D2